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Thin film analysis with reflectometry and white light interferometry

     
   17 Sept. clessidra che gira 11:30 - 13:00
FRESCOES ROOM
energy
ADVANCED MATERIALS
energy
CHARACTERIZATION & METROLOGY
TT.II - Technical Parallel Track Sessions
Thin film analysis with reflectometry and white light interferometry
Co-organized with KLA Intruments
Chair: Paolo CARROZZO, Gambetti Kenologia Srl

This workshop gathers a multidisciplinary group of scientists and specialists to share perspectives on cutting-edge ITO analysis techniques. Organized by Gambetti Kenologia and KLA Instruments, the event will showcase diverse metrology techniques for thin film characterization. Participants will engage in discussions on current developments in ITO stress analysis and gain hands-on experience with reflectometry and optical profilometry tools. The program is designed to foster collaboration and deepen understanding of precision metrology in thin film applications.


TT.II.B.1
Tunzala KLEIN
KLA Instruments
F20 - Thin Film Measurement System
KLEIN Tunzala  
TT.II.B.2 Tunzala KLEIN
KLA Instruments
P3D Optical profilometry
KLEIN Tunzala  
 

 

 
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